大面積自動微粒測量裝置
- SELPA(掃描電子粒子分析儀),用於粒子分析的掃描電子顯微鏡。
- 自動化的影像和成分分析設備,可以檢查工業應用中各種粒度測量,成分(比例)分析和分佈圖的結果與清潔度(細顆粒)設備相比,可以通過常規光學顯微鏡分析更小的顆粒尺寸。
- SEM / EDS自動化設備,可以獲取所選區域的組件(分佈)分析結果。

產品應用
- 潔淨度檢查(汽車製造商和供應商,飛機發動機製造商等)
- 金屬雜質檢查
- 化學殘留物檢查
- GSR(槍彈殘留物 )檢查
- 礦物質,石棉檢查
- 顆粒檢查

| Electron Gun | Pre-centered Cartridge |
| Source | Tungsten (W) |
| Magnification | x60 to x5,000 |
| Acceleration Voltage | 1 to 30kV (1kV increment) |
| Vacuum Mode | Variable Pressure (10Pa, 20Pa, 40Pa, 60Pa) |
| Detector | BSED(DP) |
| Stage | X: 100mm (Motorized) Y: 100mm (Motorized) Z: 12 to 40mm (Motorized) |
| Chamber Size | 220mm in diameter |
| Maximum Sample Size | 100mm in diameter |
| Maximum Sample Height | 28mm |
| GUI | NanoStation 4.1 |
| Auto Image Adjustment | Auto Focus (New algorism) Real Time Auto B/C (Normalized algorism) One click Auto B/C |
| Vacuum System | Turbo Pump Rotary Pump MFC (VP control) |
| Special Feature | Chamber View Camera Quadriad Membrane Filter Specimen Stage Multiple Pin Stub Specimen Stage |
| EDS | Oxford / Bruker |
| EDS Option | Clean / Steel / GSR / Mineral |